کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1797383 1023789 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Numerical investigation of crucible rotation effect on crystallization rate behavior during Czochralski growth of Si1−xGex crystals
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Numerical investigation of crucible rotation effect on crystallization rate behavior during Czochralski growth of Si1−xGex crystals
چکیده انگلیسی

Crucible rotation effect on crystallization rate behavior during CZ Si1−xGex growth has been numerically studied for several crystal positions of the growth, including the initial and final stages. It has been shown that the melt flow structures strongly differ at various crucible rotation rates and at decreasing the melt depth, which results in quite specific behavior of crystallization characteristics. The computations explained physical reasons of experimentally observed unstable crystal growth at the stage of upper cone formation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 287, Issue 2, 25 January 2006, Pages 281–286
نویسندگان
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