کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
183031 459531 2016 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Sono-electrodeposition transfer of micro-scale copper patterns on to A7 substrates using a mask-less method
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
Sono-electrodeposition transfer of micro-scale copper patterns on to A7 substrates using a mask-less method
چکیده انگلیسی

A patterned anode tool was used to transfer electrodeposited microstructures on to an un-patterned A7 sized cathode by maintaining very narrow separation (300 μm) between the two electrodes and agitating the fluid in the inter-electrode gap by ultrasonic means. A non-acidic copper solution with a low content of metal ions and additives was used. Limiting current experiments were initially performed to demonstrate that improved and uniform agitation could be maintained within the inter-electrode gap at relatively low ultrasonic powers of 5 to 30 W L−1. The best pattern definition was obtained at a US power of 5 W L−1 and a current density of 20 mA cm−2. Importantly, the results obtained were comparable to those obtained by conventional through-mask plating. A single anode tool could be used to pattern up to five substrates, substantially minimising the amount of lithographic processing required. These results suggest that the proposed technique is a useful mask-less microfabrication process for pattern transfer on to large substrates.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Electrochimica Acta - Volume 207, 20 July 2016, Pages 207–217
نویسندگان
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