Electrochemical Micromachining under Mechanical Motion Mode

• ECMM is performed under mechanical motion mode.
• The mass transfer is improved to avoid tool wear.
• The potential distribution is improved which results in higher quality.

Miniaturization and integration are the basic requirements of modern microfabrication. Electrochemical micromachining takes the advantages of no tool wear, no heat effect and high removal rate. In this paper, we investigate the electrochemical micromachining under mechanical motion mode. A tool alignment method was proposed based on the feedback of tunnel current. The effects of motion mode, rate and the distance between tool and workpiece on micromachining quality were investigated. Since the metal anodic processes are fast kinetically, the mechanical motion mode makes electrochemical micromachining a high efficient direct-writing technique for microfabrication.