کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1884810 | 1043368 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Variable-energy positron annihilation study of subnanopores in SiOCH-based PECVD films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
تشعشع
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چکیده انگلیسی
Subnanoporosity was introduced into SiOCH-based thin films by mixing tetraethyl orthosilicate with hexamethyldisiloxane (HMDSO) in the plasma enhanced chemical vapor deposition process, and was evaluated by the variable-energy positron annihilation lifetime technique. It was found that with increasing the HMDSO fraction both porosity and pore size were enhanced, as evidenced by the decreased refractive index and increased ortho-positronium lifetime. The lifetimes from 2.0 to 6.8Â ns suggested the tunable pore volumes within a range of 0.1-0.7Â nm3.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Radiation Physics and Chemistry - Volume 76, Issue 2, February 2007, Pages 213-216
Journal: Radiation Physics and Chemistry - Volume 76, Issue 2, February 2007, Pages 213-216
نویسندگان
Kenji Ito, Toshitaka Oka, Yoshinori Kobayashi, Ryoichi Suzuki, Toshiyuki Ohdaira,