کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
216999 1426339 2006 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Vapour pressure measurement of metal organic precursors used for MOVPE
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
Vapour pressure measurement of metal organic precursors used for MOVPE
چکیده انگلیسی

The paper presents methodology of vapour pressure measurement of metal organic precursors, describes two static apparatuses for vapour pressure measurement that have recently been constructed in the authors’ laboratory, discusses handling and preparation of metal organic precursors prior to vapour pressure measurement by a static method and briefly presents the method of simultaneous treatment of vapour pressure and thermal data. New vapour pressure data of triethylantimony [CAS RN: 617-85-6] in the temperature range from 238 K to 309 K are reported. Parameters of the Antoine and of the Cox equations for trimethylgallium [CAS RN: 1445-79-0] and trimethylaluminium [CAS RN: 75-24-1] are reported that were derived from the most reliable vapour pressure data and the related thermal data using simultaneous multi-property correlation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: The Journal of Chemical Thermodynamics - Volume 38, Issue 3, March 2006, Pages 312–322
نویسندگان
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