GISAXS analysis of ion beam modified films and surfaces

Simple and efficient methods for the accurate structural characterization of ion-beam modified materials are important due to their interesting properties and many applications. Here we demonstrate the application of the Grazing incidence small angle X-ray scattering (GISAXS) method on the structural analysis of swift heavy ion-beam modified materials. Passing through a material, an accelerated ion usually modifies its surrounding causing the formation of nano-objects along its trajectory, called ion track. We show that GISAXS can be used to determine the structural properties of the nano-objects formed along the ion tracks, as well as their ordering properties. We have developed theoretical models describing GISAXS intensity distributions of the systems having different ordering types. The efficiencies of the models are tested on experimental examples.