Single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A and (001) using atomic layer deposition

Single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A and (001) using atomic layer deposition

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 178, 25 June 2017, Pages 125-127

C.K. Cheng, L.B. Young, K.Y. Lin, Y.H. Lin, H.W. Wan, G.J. Lu, M.T. Chang, R.F. Cai, S.C. Lo, M.Y. Li, C.H. Hsu, J. Kwo, M. Hong,