کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
4970901 | 1450307 | 2017 | 4 صفحه PDF | دانلود رایگان |
- A fabrication strategy for quantum dot-photonic crystal integration is presented.
- Spatial controlled hydrogen diffusion in dilute nitrides is used.
- Weak coupling effect between single photon emitter and cavity are observed.
We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~Â 20Â nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.
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Journal: Microelectronic Engineering - Volume 174, 25 April 2017, Pages 16-19