Lithography-free microfabrication of AlGaN/GaN 2DEG strain sensors using laser ablation and direct wire bonding

Lithography-free microfabrication of AlGaN/GaN 2DEG strain sensors using laser ablation and direct wire bonding

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 173, 5 April 2017, Pages 54-57

Karen M. Dowling, Hongyun So, Anju Toor, Caitlin A. Chapin, Debbie G. Senesky,