Depth profiling investigation by pARXPS and MEIS of advanced transistor technology gate stack

Depth profiling investigation by pARXPS and MEIS of advanced transistor technology gate stack

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 169, 5 February 2017, Pages 24-28

L. Fauquier, B. Pelissier, D. Jalabert, F. Pierre, R. Gassilloud, D. Doloy, C. Beitia, T. Baron,