MEMS-based fabrication of high-performance inductors with back hollow structure and ferromagnetic film

MEMS-based fabrication of high-performance inductors with back hollow structure and ferromagnetic film

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 168, 25 January 2017, Pages 5-9

Gang Wang, Houfang Liu, Haochuan Qiu, Keyu Ning, Yi Yang, Xiaoli Li, Xiaohong Xu, Marion Lavanant-Jambert, Sébastien Petit-Watelot, Yuan Lu, Tian-Ling Ren,