کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5005865 | 1461376 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
High performance TiO2 nanotubes antireflection coating
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
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چکیده انگلیسی
The present study analyzes the use of TiO2 layer as antireflection coating. TiO2 thin films were prepared on silicon substrate by electrochemical anodization process with thicknesses of 130 and 170Â nm. The films exhibit a uniform nanotubular structure. The ellipsometry measurement data were analyzed using a multi-layer model, the bottom layer is a dense layer of TiO2 and the top layers are porous; they are formed by a mixture of TiO2 and void. The values of refractive index are obtained by the Bruggeman effective medium approximation. The refractive indexes of the bottom and top TiO2 sublayers were about 2.3 and 1.6, respectively. The lower values of reflectance are obtained with the thinnest film. For these samples the reflectance decreases about 90% compared to silicon and in some cases the reflectivity is less than 5%. The thickness influences of TiO2 thin films and their synthesis parameters on the optical constants are discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 71, 15 November 2017, Pages 427-432
Journal: Materials Science in Semiconductor Processing - Volume 71, 15 November 2017, Pages 427-432
نویسندگان
Daniel Fabián RodrÃguez, Patricia MarÃa Perillo, Marcela Patricia Barrera,