کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5006221 1461390 2017 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Ga-migration on a Ga-rich and As-stabilized surfaces: Ga-droplet and GaAs- nanostructure formation
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Ga-migration on a Ga-rich and As-stabilized surfaces: Ga-droplet and GaAs- nanostructure formation
چکیده انگلیسی
This study investigates the Ga migration behavior in the droplet formation process on GaAs (100), (111)A, and (111)B surfaces. A Ga migration model, consisting of intrinsic and thermally induced Ga migration on Ga-rich surface, is proposed. This model can explain the Ga migration on Ga-rich surface at low temperature compared to the conventional growth mode of GaAs epitaxy. The Ga migration length is greatest for (111)B, followed by (100) and (111)A surfaces at temperature ranging from 50 to 500 °C. The Ga diffusion from a droplet also discuss under As-stabilized conditions. The Ga diffusion direction and length strongly depend on the surface orientation and surface stoichiometry.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 57, January 2017, Pages 70-76
نویسندگان
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