کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
503709 | 863803 | 2009 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A fast level set framework for large three-dimensional topography simulations
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A fast level set framework for large three-dimensional topography simulations A fast level set framework for large three-dimensional topography simulations](/preview/png/503709.png)
چکیده انگلیسی
We present fast methods to describe the surface evolution of large three-dimensional structures. Based on the sparse field level set method and the hierarchical run-length encoding level set data structure optimal figures for the computation time and for the memory consumption are achieved. Furthermore, we introduce a new multi-level-set technique, which is able to incorporate multiple material regions, and which can also handle material specific surface speeds accurately. We also describe an optimal algorithm for the visibility check for unidirectional etching. The presented techniques are demonstrated on various examples.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computer Physics Communications - Volume 180, Issue 8, August 2009, Pages 1242–1250
Journal: Computer Physics Communications - Volume 180, Issue 8, August 2009, Pages 1242–1250
نویسندگان
Otmar Ertl, Siegfried Selberherr,