Synthesis, structural characterization, and volatility evaluation of zirconium and hafnium amidate complexes

Monomeric zirconium and hafnium complexes of the formula M(RNC(O)R′) were obtained upon treatment of tetrakis(dimethylamido)zirconium or tetrakis(dimethylamido)hafnium with four equivalents of secondary organic amides. These complexes combine good volatility and high thermal stability, and are promising candidates for metal oxide thin film growth precursors.129