Measurement of surface roughness of plasma-deposited films using laser speckles

- This work presents a new method for characterizing surface roughness of deposited films.
- It quantifies pixel information representing speckle pattern in terms of pixel number and grayscale.
- Physical basis is the formation of spatial height by positive light matter and negative surface plasmon.
- Strong correlations were observed between the method and atomic force microscopy.
- This signifies that the method is able to be applicable to a real-time roughness measurement.