Nanoscale multilayered and porous carbide interphases prepared by pressure-pulsed reactive chemical vapor deposition for ceramic matrix composites

► Nanoscale multilayered (SiC-TiC)n coatings were deposited by reactive CVD. ► Submicrometric TiC films with a porous multilayered microstructure were obtained. ► Pyrocarbon-free carbide interphases were studied in SiC/SiC microcomposites. ► Pores were created by Kirkendall effect at carbide sub-layer interfaces. ► The ceramic fibers underwent a chemical attack during the reactive CVD process.