کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5370356 | 1388483 | 2006 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Nanoindentation on carbon thin films obtained from a C60 ion beam Nanoindentation on carbon thin films obtained from a C60 ion beam](/preview/png/5370356.png)
Raman spectra, atomic force microscope (AFM) images, hardness (H) and Young's modulus (E) measurements were carried out in order to characterize carbon thin films obtained from a C60 ion beam on silicon substrates at different deposition energies (from 100 up to 500Â eV). The mechanical properties were studied via the nanoindentation technique. It has been observed by Raman spectroscopy and AFM that the microstructure presents significant changes for films deposited at energies close to 300Â eV. However, these remarkable changes have not been noticeable on the mechanical properties: apparently H and E increase with higher deposition energy up to â¼11 and â¼116Â GPa, respectively. These values are underestimated if the influence of the film roughness is not taken into account.
Journal: Applied Surface Science - Volume 252, Issue 22, 15 September 2006, Pages 8005-8009