A BioMEMS chip with integrated micro electromagnet array towards bio-particles manipulation

• A novel BioMEMS chip towards the manipulation of micro/nano magnetic particles is proposed.
• Electromagnets array and microfluidic structure are fabricated on a compact chip, without any post-fabrication process.
• A universal optimization method for the design of a planar microcoil array.
• A new tubeless method to introduce fluid onto MEMS chip.

We propose in this paper the design and implementation of a novel BioMEMS chip towards the manipulation of magnetic micro/nano particles. Our proposed device integrates a planar microcoil array and a microfluidic structure on a single chip, without any post-fabrication process. Meanwhile, a multiple coil cooperation regime is studied from simulation by Finite Element Software and applied in application to increase the manipulation efficiency. Taking advantage of computer-aided microplotter to introduce microfluidics to the chip, the traditional microtubes and syringe pump are avoided. Hence, this chip is compact, low-cost and mass-producible. Experiment is performed using antibody coated magnetic particles with mean diameter 1.5 μm, and the results reveal that this chip can achieve a high efficiency with trapping rate over 90% while consuming a current of 40 mA, thus it has a great potential in bio-particles manipulation for point of care diagnostics.

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