Nanofabrication of photonic crystal slabs with sealed airholes for optofluidic applications

- Suspended 2D Si PhC slabs were fabricated using optimized nanoscale pattern transfer.
- PhC airholes were sealed with a SiO2 layer deposited by glancing angle deposition.
- The capping layer comprises inverted nanotips coalesced at a thickness of 260 nm.
- The capped PhC slab can be used to develop integrated optofluidics and photonics.