Silicon micro-fluidic cooling for NA62 GTK pixel detectors

• Micro-channels cooling in silicon applied to particle detectors.
• Single phase cooling in micro-channels of pixel detector at CERN.
• Micro-fabrication technique and device pressure resistance.
• Kovar minimized fluidic connectors soldered on silicon.
• Mechanical precision jigs to assembly a micro-channels cooled detector at CERN.

Silicon micro-channel cooling is being studied for efficient thermal management in application fields such as high power computing and 3D electronic integration. This concept has been introduced in 2010 for the thermal management of silicon pixel detectors in high energy physics experiments.Combining the versatility of standard micro-fabrication processes with the high thermal efficiency typical of micro-fluidics, it is possible to produce effective thermal management devices that are well adapted to different detector configurations. The production of very thin cooling devices in silicon enables a minimization of material of the tracking sensors and eliminates mechanical stresses due to the mismatch of the coefficient of thermal expansion between detectors and cooling systems.The NA62 experiment at CERN will be the first high particle physics experiment that will install a micro-cooling system to perform the thermal management of the three detection planes of its Gigatracker pixel detector.

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