کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
539186 1450342 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of plasmonic nanopillar arrays based on nanoforming
ترجمه فارسی عنوان
ساخت مقادیر نانوذره پلاسمونیوم بر اساس نانو ساختار
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
چکیده انگلیسی


• A new fabrication method for ordered plasmonic nanopillar array is developed.
• Au-capped nanopillar arrays exhibit higher refractive index sensitivity.
• Au-capped nanopillar arrays with Ag coating show good performance as SERS substrates.

A new fabrication method for realizing ordered nanopillar array is reported in this paper. First, a metallic nanodot array is prepared by combining two techniques, viz., nano-grid patterning by Nanoplastic Forming (NPF) and dot agglomeration by thermal dewetting. These processes do not include complicated and expensive procedures such as electron beam lithography. Then Au-capped nanopillar arrays are produced by reactive ion etching (RIE). In the refractive index sensing application, it is shown that the sensitivity of the Au-capped nanopillar array is higher than that of the Au nanodot array. The plasmonic nanopillar arrays with Ag coating are used as SERS-active substrates, which exhibit good performance.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 139, 1 May 2015, Pages 7–12
نویسندگان
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