کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
539280 | 1450379 | 2013 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Enhancing proton beam writing system with auto scanning software and stage movement
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
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چکیده انگلیسی
Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.
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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 102, February 2013, Pages 12–17
Journal: Microelectronic Engineering - Volume 102, February 2013, Pages 12–17
نویسندگان
Truong Phi Nguyen, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa,