کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
539389 | 1450358 | 2014 | 5 صفحه PDF | دانلود رایگان |
• Reliable anti-sticking coatings on nickel surfaces are produced based on perfluoro-alkyl phosphates and -phosphonates.
• Oxygen plasma pre-treatment yields 5 nm oxide suitable for layer attachment.
• Friction force and contact angle measurements confirm the adapted surface properties.
• Stability is demonstrated with repeated nano-imprint cycles and XPS.
Nickel is the preferred material for molds used in high throughput micro injection molding and roll-to-roll processes. We present different solutions for anti-sticking layers for nickel-based nanoreplication tools, which are highly desired for replication of features in the sub-micrometer and nanometer scale. Layers of fluorocarbon molecules, bound to nickel via different head groups, were evaluated via friction force and contact angle measurements, X-ray photoelectron spectroscopy and imprint tests. The robustness of fluorinated phosphates and phosphonates applied to nickel pre-treated in oxygen plasma is similar to silanes used on silicon molds.
Figure optionsDownload as PowerPoint slide
Journal: Microelectronic Engineering - Volume 123, 1 July 2014, Pages 23–27