کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
539412 1450358 2014 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Multi-electron-beam deflector array
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Multi-electron-beam deflector array
چکیده انگلیسی


• We have designed a multi beam array deflector.
• We have modeled the multi beam array deflector.
• We have fabricated the multi beam array deflector.

In single electron beam columns the alignment of the beam is obtained either by mechanical shifting the lenses or by x/y alignment deflectors. We are developing multi electron beam columns for electron microscopy and lithography. The problem in multi-beam systems is that mechanical alignment and simple x/y deflectors can only align the total array of beams in the x/y direction and not correct the position of individual beamlets. We present here a simple design, fabrication, electron-optical analysis and experimental results of a multi-beam x/y deflector array that can deflect each beamlet separately. The array is fabricated with micro-fabrication technology with in-plane deflection plates made of molybdenum. The electron optical properties of this in-plane deflector are simulated and compared to a traditional deflector. The experimental measurements are compared with the simulations and are in agreement.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 123, 1 July 2014, Pages 140–148
نویسندگان
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