Characterization of the primary X-ray source of an XPS microprobe Quantum 2000

The X-ray source was characterized in detail. The lateral dependency of the primary X-ray intensity and the peaks FWHM were measured as function of the position within the electrostatically rasterable scan area. Additionally, the focussing quality of the monochromator was determined. Therefore the lateral intensity distribution within the primary X-ray beam was estimated far below the 1% intensity level.