Electron backscattering from solid targets: Elastic scattering calculations

Analytical expression of the target atomic number dependence of the numerical coefficient in the Nigam atomic screening factor is proposed here to approximate the Rutherford elastic scattering cross sections for slow electron beams impinging on selected solid targets (from Be to Au) in the primary energy range 1-4 keV. Applications are then proposed in terms of Monte Carlo calculation of backscattering coefficient. In this respect, tabulations of backscattering coefficients are here reported for slow electrons in solid targets of interest pointing out a reasonable agreement with the data available in the literature. Analytical expressions of the target atomic number dependence of the electron backscattering coefficient is also suggested for selected electron primary energies ranging from 1 to 4 keV allowing thus an accurate determination of backscattering coefficients for low-energy electrons in solid targets without any resort in Monte Carlo type calculations.