Comparative study of the modelling of the spectral background of photoelectron spectra with the Shirley and improved Tougaard methods

► Development of spectrum processing software for XPS (Photoelectron Spectra). ► Research of both peak form and spectral background analysis of core level XP spectra. ► Comparison of the traditional Shirley background with the improved Tougaard background. ► Improvement of the Tougaard background method using new adjustable fit parameters. ► Integration of adjustable fit parameters in the inelastic electron scattering cross section.