Resolving overlapping peaks in ARXPS data: The effect of noise and fitting method

► Noise is an important factor affecting the fitting of overlapping peaks in XPS data. ► The combined information in ARXPS data can be used to improve fitting reliability. ► The error on the estimation of the peak parameters depends on the peak-fitting method. ► Simultaneous fitting method is much more robust against noise than sequential fitting. ► The estimation of the error range is better done with ARXPS data than with XPS data.