کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
539796 1450393 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nanopatterned UV curable hydrogels for biomedical applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Nanopatterned UV curable hydrogels for biomedical applications
چکیده انگلیسی

With an increasing use of emerging patterning technologies such as UV-NIL in biotechnological applications there is at the same time a raising demand for new material for such applications. Here we present a PEG based precursor mixed with a photoinitiator to make it UV sensitive as a new material aimed at biotechnological applications. Using HSQ patterned quartz stamps we observed excellent pattern replication indicating good flow properties of the resist. We were able to obtain imprints with <20 nm residual layer. The PEG based resist has hydrogel properties and it swelling in water was observed by AFM.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 87, Issues 5–8, May–August 2010, Pages 1057–1061
نویسندگان
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