کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
539879 871275 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Mapping of elastic modulus at sub-micrometer scale with acoustic contact resonance AFM
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Mapping of elastic modulus at sub-micrometer scale with acoustic contact resonance AFM
چکیده انگلیسی

Atomic Force Acoustic Microscopy (AFAM) is a powerful near field technique combining the high spatial resolution of Atomic Force Microscope (AFM) with ultrasonic stresses to access mechanical properties of material shallow surfaces (essentially local stiffness magnitudes like Young modulus). In this article, we discuss different experimental set-up and modelling approaches to determine quantitatively the Young modulus of thin films. Static experiments carried-out on dense and nanoporous silica have shown a good agreement with nanoindentation experiments. Stiffness mapping have also been performed on macroporous silica and copper interconnect structures, showing the ability of our set-up to sense different mechanical answers at sub-micrometer scale.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 87, Issue 3, March 2010, Pages 416–420
نویسندگان
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