کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
539962 | 1450370 | 2013 | 5 صفحه PDF | دانلود رایگان |

This paper proposes an ultraviolet (UV) sensor based on surface acoustic waves (SAWs) using ZnO nanoparticles. The UV sensor consists of an UV-sensitive film and a piezoelectric substrate propagating shear–horizontal (SH) waves. The UV-sensitive film is fabricated using commercially available ZnO nanoparticles by a solution process. The material properties of the ZnO nanoparticle-based film were evaluated using scanning electron microscopy, photospectrometry, and X-ray diffraction. The characteristics of the SAW-based UV sensor were tested under UV light (λ = 365 nm) using a network analyzer and a commercial UV lamp. The sensitivity and the linearity of the SAW-based UV sensor are 180.43 Hz/μW and 0.932 in frequency shift and 0.14°/μW and 0.965 in phase shift, respectively. The fabrication of the newly developed SAW-based UV sensor is simple but shows comparable characteristics to sensors having a much more complex production process.
Figure optionsDownload as PowerPoint slideHighlights
► We demonstrated a SAW based UV sensor with ZnO NP–based film.
► Polycrystalline ZnO film based on nanoparticles was deposited using aqueous solutions.
► The conductivity of ZnO NP–based film was increased under UV irradiation.
► Increasing the conductivity of ZnO NP–based film induced a reduction in SAW velocity.
► Increasing UV intensity increased a shift in the frequency and the phase.
Journal: Microelectronic Engineering - Volume 111, November 2013, Pages 105–109