Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

• NIR photo-polymerization for microtips self-writing on VCSELs is optimized.
• Sensitivity to oxygen quenching is controlled thanks to a spin-coating process.
• Optimal conditions for collective self-writing on VCSELs are determined.
• Tipped-VCSELs emit a focused beam suitable for scanning probe optical microscopy.

We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.

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