Plasma induced deep ultraviolet emissions from MgZnO films

Cubic rocksalt structured Mg0.54Zn0.46O films have been prepared, and the films show a wide bandgap of 5.47 eV. Obvious emission at around 276 nm has been detected when the films are placed in the ambient of plasma, and the output power of the plasma induced deep ultraviolet emission can reach around 56 μW, which is the highest value ever reported for ZnO-based DUV light-emitters. The deep ultraviolet emission is believed to come from the Mg0.54Zn0.46O films excited by the kinetic radicals of the plasma.