Light emission from a-Si:C:O:H films fabricated by C2F6 and O2/C2F6 plasma treating silicone oil liquid

► Light emission amorphous Si:C:O:H films were fabricated at low temperature by C2F6 and O2/C2F6 plasma treating silicone oil. ► A-Si:C:O:H films fabricated by C2F6 plasma treatment exhibited white photoluminescence at room temperature. ► A-Si:C:O:H films fabricated by O2/C2F6 plasma treatment exhibited blue photoluminescence. ► Blue emission at 469 nm was mainly related to the sp3 and sp2 hybridized carbons, SiC bond and carbon dangling bonds.