Visible photoluminescence from silicon-incorporated diamond like carbon films synthesized via direct current PECVD technique

► Silicon-incorporated diamond like carbon (Si-DLC) films were deposited via DC-PECVD. ► FTIR studies confirmed the presence of Si-C, Si-H and Si-H2 bondings. ► Room temperature photoluminescence study showed a broad peak centered at around 467 nm. ► PL peak intensity was found to increase monotonically with Si percentages.