کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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540324 | 1644960 | 2012 | 9 صفحه PDF | دانلود رایگان |

A simple method for replicating metallic stamp from original masters via combined nanoimprint and electroforming is presented. In this work we demonstrate the generality of the method by replicating structures with dimensions ranged from several microns to sub-100 nm in large patterned area. The structures were transferred first into an intermediate polymer sheet (IPS) with good uniformity and high structural fidelity, and then this IPS was used as the galvano-template for nickel electroforming. The major advantage of the method relies on the pattern transfer occurred between a soft polymer and the hard master, thereby the risk of damaging the mold is extremely low.
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► Metallic stamp replication via nanoimprint and electroforming.
► Stamp replication method that gives higher quality and longer lifetime.
► Replication method that is very gentle on master stamp.
Journal: Microelectronic Engineering - Volume 91, March 2012, Pages 112–120