کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
540324 1644960 2012 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A method for metallic stamp replication using nanoimprinting and electroforming techniques
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
A method for metallic stamp replication using nanoimprinting and electroforming techniques
چکیده انگلیسی

A simple method for replicating metallic stamp from original masters via combined nanoimprint and electroforming is presented. In this work we demonstrate the generality of the method by replicating structures with dimensions ranged from several microns to sub-100 nm in large patterned area. The structures were transferred first into an intermediate polymer sheet (IPS) with good uniformity and high structural fidelity, and then this IPS was used as the galvano-template for nickel electroforming. The major advantage of the method relies on the pattern transfer occurred between a soft polymer and the hard master, thereby the risk of damaging the mold is extremely low.

Figure optionsDownload as PowerPoint slideHighlights
► Metallic stamp replication via nanoimprint and electroforming.
► Stamp replication method that gives higher quality and longer lifetime.
► Replication method that is very gentle on master stamp.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 91, March 2012, Pages 112–120
نویسندگان
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