کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
540846 871349 2007 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Scanning white light interferometry in quality control of single-point tape automated bonding
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Scanning white light interferometry in quality control of single-point tape automated bonding
چکیده انگلیسی

We report on applying a scanning white light interferometry (SWLI) for quality control of aluminum lead single-point tape automated bonding (spTAB). A spTAB process was used to connect Al leads on a thin polyimide flex to Al bond pads on a flexible Al-polyimide cable. In the experiment three different bonding process parameters, i.e. bond force, ultrasonic power, and ultrasonic treatment time were varied in order to maximize the pull force. A custom built scanning white-light interferometer was used to measure the bond height in order to correlate this parameter with the tensile bond force. This force was obtained in a destructive way by a consecutive pull test. All bonds with a height within (7.22 ± 1.80 μm), possessed a tensile strength exceeding 85 mN. This was verified by a separate validation measurement where the pull force of bonds complying with the height requirement was recorded. Based on the 3D observations the conditions for an acceptable bond quality were revisited and refined.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 84, Issue 1, January 2007, Pages 114–123
نویسندگان
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