EUV multilayer optics

According to the optics requirements of an EUVL tool, the accurate deposition of high reflective and laterally graded multilayers on ultraprecise polished substrates can be regarded as one of the major challenges of EUV lithography development today. To meet these requirements, a new dc magnetron sputtering system NESSY and technologies to coat laterally graded EUV multilayers on curved optics were developed. The major characteristics of the deposition tool and results of sputtered multilayer optics are presented in this paper.