کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
541435 | 871468 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber](/preview/png/541435.png)
چکیده انگلیسی
This paper presents a video system for preventing a collision of the micro gripper and the stage on which the micro component is located during micro manipulation in the chamber of a scanning electron microscope. This system consists of a micro manipulation station, micro camera with magnification lenses and a reflective specimen stub. Special focus is given to the approach procedure of the micro gripper toward the micro component, a sequence that is crucial during a micro manipulation process. A new control program which replaced the original manual control of the micro manipulation station enables improved system performance, especially fine adjustment, positioning and manipulation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 87, Issue 2, February 2010, Pages 139–143
Journal: Microelectronic Engineering - Volume 87, Issue 2, February 2010, Pages 139–143
نویسندگان
Al. Cvetanovic, An. Cvetanovic, A. Deutschinger, I. Giouroudi, W. Brenner,