کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
541514 1450395 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography
چکیده انگلیسی

In nanoscale stamp fabrication, the overheads of time, cost and patterning area are soaring. Furthermore, the lifetime of a stamp is affected by the process conditions, particularly the number of times, resist parameters, pressure, and temperature. The fabrication of cylindrical stamps is also rather difficult with some nanoscale patterns. However, if a cylindrical stamp can be fabricated with a nanoscale pattern, improvements can possibly be made with regard to the size of the area, the minimization of costs, and the protection of the master stamp. This paper proposes a process of fabricating a cylindrical double-layered stamp with two different properties. The stamps are verified through the application of a roller-type ultraviolet-nanoimprint lithographical process on the ANT-6R developed by the Korea Institute of Machinery and Materials.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 86, Issues 4–6, April–June 2009, Pages 604–607
نویسندگان
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