کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
541517 | 1450395 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating](/preview/png/541517.png)
چکیده انگلیسی
Roller embossing has attracted more attention in recent years due to its rapid and continuous process for mass production. The fabrication of roller is a challenge due to microstructures on the curved surface. This paper proposes a method of fabricating roller mold with microstructures on the surface using novel stepped rotating lithography and electroless nickel plating. The results prove that the microstructures can be successfully fabricated onto the metal roller using the proposed procedure. In this study, the roller with micro-grooves whose average height is 1.1 μm and widths are 23 and 45 μm have been successfully fabricated.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 86, Issues 4–6, April–June 2009, Pages 615–618
Journal: Microelectronic Engineering - Volume 86, Issues 4–6, April–June 2009, Pages 615–618
نویسندگان
Tzu-Chien Huang, Jing-Tang Wu, Sen-Yeu Yang, Po-Hsun Huang, Shuo-Hung Chang,