کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
541770 871490 2007 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process
چکیده انگلیسی

This paper reports an innovative technique for rapid fabrication of ultraviolet-cured polymer microlens arrays based on soft roller stamping process. In this method, a soft roller with microlens array cavity is made by casting a pre-polymer of polydimethylsiloxane (PDMS) in a plastic master of microlens array. The plastic master is prepared using gas-assisted hot embossing of polycarbonate (PC) film over a silicon mold with micro-holes array. The microlens array cavity on the soft roller is filled with liquid UV curable polymer first. The roller rolls and stamps over the traveling transparent substrate. The microlens array pattern is formed. At the same time, the pattern on the substrate is cured by the UV light radiation while traveling through the rolling zone.In this study, a roller stamping facility with UV exposure capacity has been designed, constructed and tested. The replication quality, surface roughness and optical property of the replicated microlens arrays are measured, analyzed and proved satisfactory. This study demonstrates the potential of soft roller stamping for continuous rapid mass production.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 84, Issue 2, February 2007, Pages 355–361
نویسندگان
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