کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
541854 1450399 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
UV curing effects on mechanical and electrical performances of a PECVD non-porogen porous SiOC:H films (in k [2.2–2.4] range) for 45 nm node and below
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
UV curing effects on mechanical and electrical performances of a PECVD non-porogen porous SiOC:H films (in k [2.2–2.4] range) for 45 nm node and below
چکیده انگلیسی

A challenge for semiconductor industry is to reach low permittivity required by ITRS (k < 2.4) integrating porous interconnect insulator for the sub-65 nm technology nodes keeping high mechanical performances as close as possible to dense a-SiOC:H material (H = [1.5–1.8 GPa], E = [8–11 GPa]). Thus, UV post-deposition treatments were carried out on single PECVD non-porogen porous methylsilsesquioxane (MSQ) films, proposed for 45 nm node and below. UV curing is able to enhance stiffness revealing a 50% increase in reduced modulus without degrading k-value. The paper reveals that UV efficiency is actually limited by a top SiO2-like dense layer. Indeed, without this capping, 8 min of UV cure exposure enable to reach a 300% increase in reduced modulus and a 600% increase in hardness maintaining k at 2.27. Finally, UV curing on 300 nm porous MSQ film stacks is investigated. The study correlates the limited UV effect by the capping layer and demonstrates that the best stack mechanical properties improvement with limited k degradation is achieved performing UV curing on each layer combined with interfacial hydrogen plasma treatment.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 83, Issues 11–12, November–December 2006, Pages 2136–2141
نویسندگان
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