Fabrication and characterization of MEMS cantilever array for switching applications

• Increasing the current handling capacity of cantilever switches.
• Batch Fabrication – Cantilever Array.
• Performance analysis based on our previous finding "reference 4".
• Power - 10 mW for single beam.
• Testing of these devices is done to ascertain the enhancement in full power handling potential (Current capacity).

The electromechanical switches have been playing an important role in technology particularly in the industrial applications. Along with many components, this switch is also miniaturized and showing many interesting properties. In this work, the design and development of micro-cantilevers switch array for increasing the current handling capacity of the device for switching applications is presented. The aim is to design an array of MEMS cantilever beam switch with low actuation voltage for large current handling applications. The aluminum interconnects having current density in the endurable range is the backbone for the designed cantilever switch. These switches are arranged in parallel to split the current in multiple interconnect. The switch is fabricated and electrically tested to compare the experimental values and theoretical model. The characterization results show an increase in current handling capacity with lower actuation voltage in these switches. This switch can also be configured for multiple numbers of cantilever beams for scaling up the current capacity with low actuation voltage. Thus MEMS-based switch can be used for various power electronic circuits and applications with added advantages.

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