Chemocapacitive sensor arrays on Si substrate: Towards the hybrid integration with read-out electronics

• Optimization of layout dimensions to meet the read-out electronics specifications.
• Microfabrication of IDE arrays with 1 μm resolution.
• Chemocapacitors arrays for the detection of VOCs in industrial plants.

Chemocapacitors, i.e. capacitors where the dielectric layer is a polymeric layer with selective sorption of certain analytes, are extensively used in the monitoring of the environmental humidity and of other volatile analytes. The specifics of the detecting mechanism have been found to rely on a combination of interactions arising from vapor sorption, polymer swelling, and morphology changes. The aim of the present work is to develop a fabrication procedure of InterDigitated Electrodes (IDEs) with high sensing performance. The IDEs layout has been optimized in terms of sensing performance and is in accordance with the read-out electronics specifications. The realization and evaluation of chemocapacitor arrays integrated with read-out electronic module in the presence of various analyte vapours is demonstrated in laboratory environment. The analytes employed in the present study are typical for the printing industry of flexible packaging.

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