Fabrication and characterization of tunable multiferroic Bi0.7Dy0.3FeO3 based on-chip micro-inductor

An optical lithographic process is developed to realize Si compatible on-chip micro-inductor using single phase room temperature multiferroic system like Bi0.7Dy0.3FeO3 (BDFO) as a core material. On-chip inductor is characterized for inductance and Q factor in the frequency range of 1 kHz–1 MHz. The properties are studied at different values of current passing through the coil and also bias applied directly across the BDFO core. Tunability goes on increasing with current and reaches as high as ∼90% at 0.07 A of DC current passing through the coil whereas ∼30% tunability is obtained at 10 V of DC voltage applied across the core. It indicates that substantial change in permeability occurs even at low fields due to presence of magnetoelectric (ME) coupling in BDFO system. The use of the single layer multiferroic BDFO core simplifies the on-chip fabrication process. In addition it helps to avoid the formation of defects that are normally formed at the interface of hetero-structures. Consequently it makes the process more reliable. The integration of the on-chip multiferroic micro-inductor would be useful in miniaturizing the inductive components in electronic device circuit.

Figure optionsDownload as PowerPoint slideHighlights
► Development of photolithographic process for Si compatible on-chip micro-inductor.
► Single layer multiferroic core used for the first time simplifies the process.
► ∼90% tunability obtained at low value of DC current (0.07 A) passing through coil.
► Useful in miniaturization of inductive components in electronic device circuit.