کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
543017 | 1450386 | 2012 | 10 صفحه PDF | دانلود رایگان |
This study discussed the application of roller with bag magnetic fluid as the pressure side mold for the structural replication printing and visual imaging of Fresnel lens micro-patterns. This study developed the bag roller system equipment and employed magnetic fluids as the transfer imprinting method of the bag roller. By the evenly distributed pressure characteristic of fluids in the bag, coupled with the technical feature of progressive printing of the roller, this study examined the structural replication formability and imaging mechanism of micro-patterns after rolling. The results suggested that the proposed micro transfer printing system using roller with magnetic fluid bag can successfully transfer the Fresnel micro structure patterns onto the photo-resist substrate. Meanwhile, relevant replication molding characteristics and the imaging on the original Fresnel lens mold were compared and discussed.
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► Magnetic fluid bag has very good reproduction performance of rolling imprinting.
► We can transfer the Fresnel lens microstructure onto the UV photo-resisting material.
► Internal pressure of the roller bag has no significant impact on microstructure formability.
Journal: Microelectronic Engineering - Volume 95, July 2012, Pages 49–58