کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
543017 1450386 2012 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A study on the application of micro transfer imprinting technology using roller with magnetic fluid bag in microstructures replication
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
A study on the application of micro transfer imprinting technology using roller with magnetic fluid bag in microstructures replication
چکیده انگلیسی

This study discussed the application of roller with bag magnetic fluid as the pressure side mold for the structural replication printing and visual imaging of Fresnel lens micro-patterns. This study developed the bag roller system equipment and employed magnetic fluids as the transfer imprinting method of the bag roller. By the evenly distributed pressure characteristic of fluids in the bag, coupled with the technical feature of progressive printing of the roller, this study examined the structural replication formability and imaging mechanism of micro-patterns after rolling. The results suggested that the proposed micro transfer printing system using roller with magnetic fluid bag can successfully transfer the Fresnel micro structure patterns onto the photo-resist substrate. Meanwhile, relevant replication molding characteristics and the imaging on the original Fresnel lens mold were compared and discussed.

Figure optionsDownload as PowerPoint slideHighlights
► Magnetic fluid bag has very good reproduction performance of rolling imprinting.
► We can transfer the Fresnel lens microstructure onto the UV photo-resisting material.
► Internal pressure of the roller bag has no significant impact on microstructure formability.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 95, July 2012, Pages 49–58
نویسندگان
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