Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography

High-density ordered arrays of h-PDMS nanopillars were fabricated using an anodic aluminium oxide (AAO) template. The pore diameter and the interpore distance of the replica h-PDMS molding are well consistent with that of AAO template. The inverse h-PDMS has the surface characteristic of hydrophobic and surface energy of 130°. Hexagonally arranged array can be obtained by UV-nanoimprint lithography using our proposed h-PDMS mold, and their morphologies can be transferred truly. Besides, the h-PDMS mold has been used to fabricate photonic crystal structure on GaN by nanoimprint process, which could be found an application in the light output of GaN LED.