کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
543335 871653 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication and characterization of surface micromachined stacked transformer on glass substrate
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Fabrication and characterization of surface micromachined stacked transformer on glass substrate
چکیده انگلیسی

On-chip micro-transformer with square interwinding coil has been developed. The transformer consists of stacked spiral coil which is fabricated on high resistive glass substrate using MEMS technology. The device is fabricated using simple surface micromachining process including an additional bonding process for integration purpose. The performance of the micro-transformer is illustrated through low and high frequency measurements and compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer highlighting a good prospect for the future 3-dimensional RF–MEMS device application.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 86, Issue 10, October 2009, Pages 2020–2025
نویسندگان
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